Features a clean room enclosure and a PFA Teflon sample system for multiple analyses of multiple samples. HANDYChem is suitable for the following analyses in the semiconductor industry:
| SC1 |
Ammonium Hydroxide, Hydrogen Peroxide |
| SPM |
Sulfuric Acid, Hydrogen Peroxide |
| Hot Phos |
Phosphoric Acid |
| ITO Etch |
Hydrochloric Acid, Nitric Acid |
| MAE (III) |
Nitric Acid, Acetic Acid, Hydrofluoric Acid |
| MAE |
Nitric Acid, Acetic Acid, Phosphoric Acid |
| BOE |
Hydrofluoric Acid, Ammonium Fluoride |
| DHF |
Diluted HF |
| KOH |
Potassium Hydroxide |
| TMAH |
Tetramethyl Ammonium Hydroxide |
Measurement Methods
Two types of measurement methods are used for almost all NEXTChem analyzers: titration and (ion selective) standard addition. Both types of measurements methods can be used on all NEXTChem analyzers at the same time; making each type of analyzer extremely flexible.
Titration
Titration methods involve the addition of a reagent to the sample until an endpoint is detected with an electrode or color probe. Most of the titrations utilized by the NEXTChem Process Analyzers fall with one of five different categories: acid/base, oxidation/reduction, complexation, precipitation, or color.
Standard Addition
Measurements with the Ion Selective Electrodes (ISE) utilize the standard addition method. The standard addition method involves measuring the sample with the ISE before and after a known standard has been added and using the difference in the readings to determine concentration.
Precision Reagent Pump
The heart of a process analyzer is the way reagents are delivered to the measurement cell. With all NEXTChem analyzers precision reagent pumps are used to deliver reagents. Because of the use of advanced stepper motor technology these pumps are very accurate + 0.001 mL. The utilization of a superior seal material makes the precision reagent pump very low maintenance only requiring to be rebuilt once per year.
Ease of Programming
All NEXTChem analyzers use a touchscreen interface to make them very user friendly. The analyzer is programmed in a similar manner to the interaction with a bank ATM. A series of user selected menus are used to program the analyzer. Each number value is programmed with a popup key pad menu. To make the analyzer as cost effective as possible the user interface is displayed in English only.
Multiple Sample Sizes
The CHIPChem series of analyzers can have up to two different size sample loops in a single analyzer. This allowing the analyzer make to measurements of samples which have very different chemical concentrations.
Micro Sample Dilution
The CHIPChem series of analyzers are configured to measure very high concentration chemistries. This is accomplished by utilizing a dilution measurement cell and micro sample dilution. The dilution measurement cell is used with an external micro sample capture loop (0.25 – 6.0 mL). All wetted surfaces are PFA Teflon.
Ethernet
The CHIPChem can have an Ethernet port added. With this port the analyzer can send data with Modbus IP or OPC/DDE server. Using the Ethernet port the analyzer can be remotely accessed over the Internet or Intranet for programming updates and remote troubleshooting. The Ethernet port can also be used to automatically store data on any PC connected to the same network.
GSM/SMS Modem
The CHIPChem Analyzer can be equipped with a GSM/SMS Modem. With this modem the analyzer can send alarm messages and data to a specified number of mobile phones automatically. This capability gives the analyzer real-time remote control and access.
Technical Specification
| Dilution Measurement Cell |
Sample Volume: 5 – 30 mL
Maximum Particle Size: <2mm |
| Samples / Analyses |
Titration Dilution: + 0.5%; non-dilution + 0.2%
Ion Selective Dilution: + 5.0%, non-dilution + 2.0%
Analysis Time: 2 – 10 minutes, 5 minutes typical
Sample Points: 4
Sample Temp: 10 – 212 F (-15 – 100 C)
Total Analyses: 4
Reagent Pumps: 4
Sample Sizes: 2 |
| Utilities |
Power: 110/220 VAC, 60/50 Hz, 5/3 A
Compressed Air: 70 – 100 PSI (5.5 – 6.5 bar)
Sample Pressure: 5 – 50 PSI (0.3 – 3.5 bar)
Sample Flow: 1 – 10 GPM (4 – 40 LPM)
Water Pressure: 5 – 50 PSI (0.3 – 3.5 bar)
Water Flow: 1 – 10 GPM (4 – 40 LPM) |
| Enclosures |
Class: 100 PP or CPVC
Size: 62” x 21” x 18” (158 cm x 53 cm x 44 cm)
Weight: 200 lbs (90 Kg)
Touchscreen: 5.7” color
Temperature: 40 – 100 F (5 – 40 C)
System Exhaust: 4” |
| Inputs / Outputs |
Analog Outputs: 4 off, 4-20 mA
Alarm Relays: 1 off, 3 A maximum
Serial Outputs: 1 off, RS232 / Modbus
DeviceNet / Profibus-DP: Not Available
Ethernet: 1 off, Optional
Analog Inputs: 1 off, 4-20 mA |
| Certifications |
CE
CSA-us/c |
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